ideas",
}
+@Article{edelman76,
+ author = "F. L. Edelman and O. N. Kuznetsov and L. V. Lezheiko
+ and E. V. Lubopytova",
+ title = "Formation of Si{C} and Si[sub 3]{N}[sub 4] in silicon
+ by ion implantation",
+ publisher = "Taylor \& Francis",
+ year = "1976",
+ journal = "Radiation Effects",
+ volume = "29",
+ number = "1",
+ pages = "13--15",
+ URL = "http://www.informaworld.com/10.1080/00337577608233477",
+ notes = "3c-sic for different temperatures, amorphous, poly,
+ single crystalline",
+}
+
+@Article{akimchenko80,
+ author = "I. P. Akimchenko and K. V. Kisseleva and V. V. Krasnopevtsev and A. G. Touryanski and V. S. Vavilov",
+ title = "Structure and optical properties of silicon implanted by high doses of 70 and 310 keV carbon ions",
+ publisher = "Taylor \& Francis",
+ year = "1980",
+ journal = "Radiation Effects",
+ volume = "48",
+ number = "1",
+ pages = "7",
+ URL = "http://www.informaworld.com/10.1080/00337578008209220",
+ notes = "3c-sic nucleation by thermal spikes",
+}
+
+@Article{martin90,
+ author = "P. Martin and B. Daudin and M. Dupuy and A. Ermolieff
+ and M. Olivier and A. M. Papon and G. Rolland",
+ collaboration = "",
+ title = "High-temperature ion beam synthesis of cubic Si{C}",
+ publisher = "AIP",
+ year = "1990",
+ journal = "Journal of Applied Physics",
+ volume = "67",
+ number = "6",
+ pages = "2908--2912",
+ keywords = "SILICON CARBIDES; SYNTHESIS; CUBIC LATTICES; ION
+ IMPLANTATION; SILICON; SUBSTRATES; CARBON IONS;
+ TRANSMISSION ELECTRON MICROSCOPY; XRAY DIFFRACTION;
+ INFRARED SPECTRA; ABSORPTION SPECTROSCOPY; AUGER
+ ELECTRON SPECTROSCOPY; RBS; CHANNELING; NUCLEAR
+ REACTIONS; MONOCRYSTALS",
+ URL = "http://link.aip.org/link/?JAP/67/2908/1",
+ doi = "10.1063/1.346092",
+ notes = "triple energy implantation to overcome high annealing
+ temepratures",
+}
+
@Article{reeson87,
author = "K. J. Reeson and P. L. F. Hemment and J. Stoemenos and
J. Davis and G. E. Celler",
Although tremendous progress has been achieved in the above-mentioned growth methods during the last decades, available wafer dimensions and crystal qualities are not yet statisfactory.
Thus, alternative approaches to fabricate SiC have been explored.
-In the following ...
High-dose carbon implantation into \ac{c-Si} with subsequent or in situ annealing was found to result in SiC microcrystallites in Si \cite{borders71}.
-\ac{RBS} and \ac{IR} spectroscopy investigations indicate a \unit{10}[at.\%] C concentration peak and the occurence of disordered C-Si bonds after implantation at room temperature followed by crystallization into SiC precipitates upon annealing demonstrated by a shift in the \ac{IR} absorption band and the disappearance of the C profile peak in \ac{RBS}.
+\ac{RBS} and \ac{IR} spectroscopy investigations indicate a \unit[10]{at.\%} C concentration peak and the occurence of disordered C-Si bonds after implantation at room temperature followed by crystallization into SiC precipitates upon annealing demonstrated by a shift in the \ac{IR} absorption band and the disappearance of the C profile peak in \ac{RBS}.
Utilized and enhanced, 30 years devel ... (-32)
By understanding some basci processes (32-36), \ac{IBS} nowadays has become a promising method to form thin SiC layers of high quality exclusively of the 3C polytype embedded in and epitactically aligned to the Si host featuring a sharp interface \cite{lindner99,lindner01,lindner02}.